2-Axis Stage Assembly for High Precision Motion. Used, removed from a semiconductor inspection machine made in Japan. Motion in each direction is approximately one inch, with adjustable stops. Includes Sanmei low-vibration stepping motors, with controllers and wiring included. There are three position sensors for each axis.
Very high quality construction. I would guess the unit can microstep in the single micrometer range (just a guess). Lead screws are likely Kuroda, and linear bearings are likely IKO or similar quality. The XY stage portion weighs 15.6 lbs.
Condition: Used. Carefully removed from functional equipment.
